明电舍(MEIDENSHA)真空电容器 明电舍MEIDEN可变真空电容器 明电舍MEIDEN固定真空电容器
明电舍通过40年对真空断路器的开发制造,积蓄了该领域的丰富技术经验,成功开发制造出高性能,高信赖的真空电容器。真空机器的制造,通常有两种方式1)由真空泵不停排气方式,2)制造中的真空封闭方式。本公司的真空电容器,采用了真空封闭方式进行制造,并且采用了长时间保持真空状态的构造。其产品用于:液晶屏面板制造装置领域,太阳能电池板制造领域,医疗?测量机器领域,半导体制造装置领域,广播电视播放领域,科学研究领域等官方应用于阻抗箱,匹配箱 阻抗匹配RF系统 matching box上使用
真空电容器MEIVAC的特征是
高耐电压 真空的耐电压高,易于实现小型化;
低损失 可以适用于高RF频率;
大电流通电 无整流子结构形式,适合大电流;
高信赖性 具有自我恢复性,可以承受瞬间过电压;
SCV-514M 5KV-1400PF
SCV-152.5
SCV-151
SCV-204
SVC-514M
SCV-520M
SCV-205G
SCV-155M
SCF-200.5C
SCF-53Z
SCF-201C
SCF-152Z
BDS5-3040
SCF-151Z
SCV-7.55
SCF-151.5Z
SCV-520M
SCF-55Z
SCV-514M
KIU-KR DC110V 14VA
NTG-81 0.2-1.0A 220V 50HZ
KI0-LGR 3A DC110V 0.5-2.0A
KI0-C6R DC110V 5A 50HZ 18VA
NTG-91 0.1-1.0A 220V 50HZ
SCV-152.5
SCV-250.8D
SCV-202D
SCV-104G
SCV-510M
SCV-1014G
SCV-151H55UW
SCV415H65UW
SCV-55FH55UW
SCV-85H55UW-NP
SCV-515G
SCV-152.5GT
SCV-152.5H55UW-C
SCV-125H65UW-C
SCV-415H65UW-C
SCV-85H55UW-C
SCV-510H55UW-C
SCV-415H55UW-C
SCF-200.5G
SCF-150.75Z
SCF-150.5Z
SCF-153.5H52WR
规格
形式 SCV-155M SCV-510M SCV-514M
高峰试验电压 [kVp] 15 5 5
静电容量[pF] 50-500 50-1000 90-1400
RF动作电压 [kVp] 9 3 3
直线可变性 (pF/N) 42±4
(65pF 以上) 88±6
(80pF 以上) 115±8
(150pF 以上)
转速(回) 12±1 12±1 12±1
容许电流 [Arms]
(at 13.56MHz) 100 100 100
回转转矩(N?cm)
(kgf?cm) 24.5
2.5 24.5
2.5 24.5
2.5
重量(kg)
尺寸(长度×直径) (mm)
1.3
140×φ73 1.35
140×φ73 1.4
140×φ73
真空电容器 MEIVAC
MEIVAC真空电容器系列,是基于明电舍的真空技术而开发的一种真空电容器。
真空电容器有以下用途
1 作为半导体薄膜制造设备的阻抗整合器
2 通信器材的发报线路,同调回路
3 诱电加热设备的共振回路
4 各种高频率电源的电压增幅回路
近年来,由于半导体产业的发展,真空电容器的用途扩大至CVD,蚀刻,滴溅设备等半导体薄膜制造设备阻抗
整合应用领域。
真空可变电容器
真空可变电容器是通过移动真空容器内的电极而实现静电容量的变化的电容器。
除了了装置115MM标准的型号,还搭载了耐高压特殊电极的黄金型号,同时通过风箱构造以及增强材质的大电
流低扭矩型(H系列)。
标准型特点
1 寿命长
采用高强度的不锈钢风箱,实现可变范围二分之一以下的风箱寿命达100万循环。同时通过高强度特殊螺钉
构造,在可变范围二分之一的情况下实现总回转数1000万以上的长寿命。
2微型化
陶瓷中心栓与外围共振器一体化从而是微型化得以实现。
统一设为全长140MM(装置标准115MM),容易实现机器安装时的可更换性。
强电流低扭矩型特点
强电流通电
风扇采用铜合金新材料,可以实现强电流通电。(强电流规格:空冷110Arms、130Arms、150Arms、
160Arms)
低扭矩
H系列内部构造得到改良,小于18N.cm的低扭矩使得驱动马达的微型化得以实现。
长寿命
采用高强度不锈钢风箱,通过可变范围二分之一以下的风箱寿命100万回转,以及高强度特殊螺钉构造,
能够实现可变范围二分之一的总回转达到1500万以上的超长寿命。
真空固定电容器
真空固定电容器的诱导体为真空,使用损耗较低的陶瓷作为绝缘体,极大的抑制了损耗系数。从而使电容器即
实现了微型化,又能耐高压和承受强大电流。
特点
耐高压
由于绝缘体是真空,绝缘体能承受很高的电压,即使在高电压回路中也安然无恙。
低损耗
真空诱电体能极大降低损耗。诱电体的损害只出现在构成真空容器的电容器两端的绝缘陶瓷以及导航用陶瓷
。
微型化
通过采用耐高压的特殊电极实现微型化。
型号 峰值试验电压 RF动作电压 静电容量 许可容量电容 回转行程 回转数 尺寸
Type description Peak test Peak working Capacitance Max. RF current Max.torque Turns Dimensions
voltage voltage (Min.-Max.) (13.56MHz) (Length×Diameter)
(50/60Hz) (13.56MHz) 空冷/Air cooled
SCV-55 5kVp 3kVp 30-500pF 100Arms 24.5N?cm 12回转 L140×φ60mm
SCV-7.55 7.5kVp 4.5kVp 30-500pF
SCV-151 15kVp 9kVp 10-100pF
SCV-152 12-200pF
SCV-152.5 30-250pF
SCV-510M 5kVp 3kVp 50-1000pF L140×φ73mm
SCV-514M 90-1400pF
SCV-155M 15kVp 9kVp 50-500pF
SCV-520M 5kVp 3kVp 85-2000pF L140×φ89mm
SCV-1010 10kVp 6kVp 80-1000pF
SCV-204 20kVp 12kVp 80-450pF
SCV-155G 15kVp 9kVp 25-500pF 90Arms 24.5N?cm 12回转 L140×φ62mm
SCV-251G 25kVp 15kVp 10-100pF
SCV-252G 12-200pF
SCV-252.5G 25-250pF
SCV-1010G 10kVp 6kVp 50-1000pF L140×φ73mm
SCV-1014G 90-1400pF
SCV-205G 20kVp 12kVp 50-500pF
SCV-1020G 10kVp 6kVp 85-2000pF L140×φ89mm
SCV-1510G 15kVp 9kVp 80-1000pF
SCV-250.3G 25kVp 15kVp 6-30pF 27Arms 19.6N?cm 5.5回转 L100×φ60mm
SCV-250.8G 10-80pF 72Arms
SCV-300.2G 30kVp 18kVp 6-20pF 21Arms
SCV-104G 10kVp 6kVp 60-450pF 90Arms L100×φ63mm
SCV-201.7G 20kVp 12kVp 45-170pF
SCV-7.55H65 7.5kVp 4.5kVp 20-500pF 110Arms 18N?cm 14回转 L154×φ65mm
SCV-151H65 15kVp 9kVp 20-100pF
SCV-152H65 20-200pF
SCV-152.5H65 20-250pF
SCV-510H82 5kVp 3kVp 25-1000pF 130Arms 18N?cm 14回转 L154×φ82mm
SCV-105H82 10kVp 6kVp 25-500pF
SCV-154H82 15kVp 9kVp 25-400pF
SCV-202H82 20kVp 12kVp 25-200pF
SCV-202.2H84 20kVp 12kVp 15-220pF 130Arms 18N?cm 10.5回转 L125×φ84mm
SCV-250.8H84 25kVp 15kVp 12-80pF
SCV-514H94 5kVp 3kVp 30-1400pF 150Arms 18N?cm 14回转 L154×φ94mm
SCV-107H94 10kVp 6kVp 30-700pF
SCV-155H94 15kVp 9kVp 30-500pF
SCV-202.5H94 20kVp 12kVp 30-250pF
SCV-520H110 5kVp 3kVp 35-2000pF 160Arms 18N?cm 14回转 L154×φ110mm
SCV-1010H110 10kVp 6kVp 35-1000pF
SCV-205H110 20kVp 12kVp 35-500pF
SCV-315H65G 3kVp 1.8kVp 20-1500pF 100Arms 18N?cm 14回转 L154×φ65mm
SCV-105H65G 10kVp 6kVp 20-500pF
SCV-201H65G 20kVp 12kVp 20-100pF
SCV-202H65G 20-200pF
SCV-202.5H65G 20-250pF
SCV-1010H82G 10kVp 6kVp 25-1000pF 120Arms 18N?cm 14回转 L154×φ82mm
SCV-155H82G 15kVp 9kVp 25-500pF
SCV-204H82G 20kVp 12kVp 25-400pF
SCV-252H82G 25kVp 15kVp 25-200pF
SCV-300.2H84G 30kVp 18kVp 10-20pF 120Arms 18N?cm 10.5回转 L125×φ84mm
SCV-1014H94G 10kVp 6kVp 30-1400pF 140Arms 18N?cm 14回转 L154×φ94mm
SCV-157H94G 15kVp 9kVp 30-700pF
SCV-205H94G 20kVp 12kVp 30-500pF
SCV-252.5H94G 25kVp 15kVp 30-250pF
SCV-1020H110G 10kVp 6kVp 35-2000pF 150Arms 18N?cm 14回转 L154×φ1
SCV-1510H110G 15kVp 9kVp 35-1000pF
SCV-255H110G 25kVp 15kVp 35-500pF
型号列举
MEIDENSHA SCV-150.6HA55UW-C
MEIDENSHA SCV-150.75HA55UW-C
MEIDENSHA SCV-200.5H55UW-C
MEIDENSHA SCV-151H55UW-C
MEIDENSHA SCV-201H55UW-C
MEIDENSHA SCV-151.5FH55UW-C
MEIDENSHA SCV-152.5H55UW-※2
MEIDENSHA SCV-83.5FH55UW-C
MEIDENSHA SCV-55FH55UW-C
MEIDENSHA SCV-85H55UW-C
MEIDENSHA SCV-310H55UW-C※2
MEIDENSHA SCV-510H55UW-C
MEIDENSHA SCV-415H55UW-C
MEIDENSHA SCV-125H65UW-C※2※3
MEIDENSHA SCV-155H65UW-C
MEIDENSHA SCV-810H65UW-C
MEIDENSHA SCV-1010H65UW-C
MEIDENSHA SCV-415H65UW-C※2※3
MEIDENSHA SCV-515H65UW-C
MEIDENSHA VP110
MEIDENSHA VP150
MEIDENSHA UW70
MEIDENSHA SCV-320H65UW-C
MEIDENSHA SCV-715H70UW-C
MEIDENSHA FS36S FS36
MEIDENSHA FS43
MEIDENSHA FC52
MEIDENSHA FC52A FC62
MEIDENSHA FH48C FH65C
MEIDENSHA FH52WR
MEIDENSHA FHA52WR
MEIDENSHA VP94L
MEIDENSHA SCV-251P94L
MEIDENSHA SCV-202.2P94L
MEIDENSHA SCV-153.5P94L
MEIDENSHA SCV-350.3P110
MEIDENSHA SCV-351P110
MEIDENSHA SCV-201.5P110C
MEIDENSHA SCV-251.5P110C
MEIDENSHA VP110
MEIDENSHA SCV-302P110
MEIDENSHA SCV-202.5P110C
MEIDENSHA SCV-252.5P110C
MEIDENSHA SCV-253.5P110
MEIDENSHA SCV-205P110
MEIDENSHA VP65
MEIDENSHA SCV-201P65
MEIDENSHA SCV-152P65C
MEIDENSHA SCV-202P65
MEIDENSHA SCV-152.5P65
MEIDENSHA SCV-202.5P65
MEIDENSHA SCV-104P65FW
MEIDENSHA SCV-124H65FW
MEIDENSHA SCV-7.55P65FW
MEIDENSHA SCV-105P65FW
MEIDENSHA SCV-125P65DW
MEIDENSHA SCV-255P110
MEIDENSHA SCV-158P110FW 15
MEIDENSHA SCV-1510P110W 40
MEIDENSHA SCV-1051P110W 40
MEIDENSHA SCV-520P110W 40
MEIDENSHA SCV-820P110W 40
MEIDENSHA SCV-325P110FW 15
MEIDENSHA SCV-340P110W 45
MEIDENSHA VP82
MEIDENSHA SCV-155P65DW
MEIDENSHA SCV-310P65FW
MEIDENSHA SCV-410P65FW
MEIDENSHA SCV-510P65W
MEIDENSHA SCV-810P65W
MEIDENSHA SCV-315P65DW
MEIDENSHA SCV-415P65DW
MEIDENSHA SCV-202P82
MEIDENSHA SCV-155P82W
MEIDENSHA SCV-1010P82W
MEIDENSHA SCV-515P82W
MEIDENSHA SCV-520P82W
MEIDENSHA SCV-200.5P82L
MEIDENSHA SCV-250.8P82L
MEIDENSHA SCV-201P82L
MEIDENSHA SCV-251P82L
MEIDENSHA SCV-201.5P82L
MEIDENSHA SCV-202P82L
MEIDENSHA SCV-202.2P82L
MEIDENSHA SCV-103.5P82LW
MEIDENSHA SCV-84P82LW
MEIDENSHA VP150
MEIDENSHA SCV-405P150
MEIDENSHA SCV-1525P150W
MEIDENSHA SCV-560P150W
MEIDENSHA SCV-202.5P94 25
MEIDENSHA "SCV-155P94
SCV-515P94 ""25"
MEIDENSHA SCV-520P94W 35
MEIDENSHA SCV-523P94W 45
MEIDENSHA SCV-150.5
MEIDENSHA SCV-151
MEIDENSHA SCV-152
MEIDENSHA SCV-155G
MEIDENSHA SCV-152.5
MEIDENSHA type2
MEIDENSHA SCV-7.55
MEIDENSHA SCV-55
MEIDENSHA SCV-155M
MEIDENSHA SCV-205G
MEIDENSHA SCV-510M
MEIDENSHA SCV-1010G
MEIDENSHA SCV-514M
MEIDENSHA SCV-1014G
MEIDENSHA SCV-204
MEIDENSHA SCV-1010
MEIDENSHA SCV-520M
MEIDENSHA SCV-201.7G
MEIDENSHA SCV-104G
MEIDENSHA SCV-300.2G
MEIDENSHA SCV-250.3G
MEIDENSHA SCV-250.8G
MEIDENSHA SCV-151GT
MEIDENSHA SCV-152.5GT
MEIDENSHA SCV-155GT
MEIDENSHA SCV-510GT
MEIDENSHA SCV-515GT
MEIDENSHA SCV-150.75GTB
MEIDENSHA SCV-53GTB
MEIDENSHA SCF-300.25H48C
MEIDENSHA SCF-300.5H48C
MEIDENSHA SCF-300.75H48C
MEIDENSHA SCF-301H48C
MEIDENSHA SCF-351H48C
MEIDENSHA SCF-251.25H48C
MEIDENSHA SCF-251.5H48C
MEIDENSHA FHA52
MEIDENSHA SCV-151HA52WR
MEIDENSHA SCV-151.5HA52WR
MEIDENSHA SCV-152HA52WR
MEIDENSHA SCV-153HA52WR
MEIDENSHA SCV-125HA52WR
MEIDENSHA SCV-510HA52WR
MEIDENSHA SCF-251.75H48C
MEIDENSHA SCF-252H48C
MEIDENSHA SCF-151H52WR
MEIDENSHA SCF-201H52WR
MEIDENSHA SCF-151.5H52WR
MEIDENSHA SCF-152H52WR
MEIDENSHA SCF-202H52WR
MEIDENSHA SCF-152.1H52WR
MEIDENSHA SCF-152.5H52WR
MEIDENSHA SCF-153H52WR
MEIDENSHA SCF-153.5H52WR
MEIDENSHA SCF-153.7H52WR
MEIDENSHA SCF-124H52WR
MEIDENSHA FH52
MEIDENSHA SCF-124.5H52WR
MEIDENSHA SCF-125H52WR
MEIDENSHA SCF-105.5H52WR
MEIDENSHA SCF-106H52WR
MEIDENSHA SCF-106.5H52WR
MEIDENSHA SCF-107H52WR
MEIDENSHA SCF-56H52WR
MEIDENSHA SCF-107.5H52WR
MEIDENSHA SCF-510H52WR
MEIDENSHA SCF-810H52WR
MEIDENSHA SCF-512.5H52WR
MEIDENSHA SCF-315H52WR
MEIDENSHA SCF-515H52WR
MEIDENSHA SCF-317.5H52WR
MEIDENSHA SCF-320H52WR
MEIDENSHA FH65C
MEIDENSHA SCF-350.5H65C
MEIDENSHA SCF-351H65C
MEIDENSHA SCF-351.5H65C
MEIDENSHA SCF-351.75H65C
MEIDENSHA SCF-352H65C
MEIDENSHA SCF-352.5H65C
MEIDENSHA FC52
MEIDENSHA SCF-150.5C
MEIDENSHA SCF-151C
MEIDENSHA SCF-151.5C
MEIDENSHA SCF-152C
MEIDENSHA SCF-150.5CA
MEIDENSHA FS36S
MEIDENSHA SCF-51S
MEIDENSHA SCF-51.1S
MEIDENSHA SCF-51.2S
MEIDENSHA "SCF-51.3S
MEIDENSHA SCF-51.4S
MEIDENSHA SCF-150.8CA
MEIDENSHA SCF-150.9CA
MEIDENSHA SCF-51.5S
MEIDENSHA SCF-52S
MEIDENSHA FC52A
MEIDENSHA FC62
MEIDENSHA SCF-151CA
MEIDENSHA SCF-151.2CA
MEIDENSHA SCF-151.5CA
MEIDENSHA SCF-151.8CA
MEIDENSHA SCF-152.1CA
MEIDENSHA SCF-200.1C
MEIDENSHA SCF-200.5C
MEIDENSHA SCF-200.75C
MEIDENSHA SCF-201C
MEIDENSHA SCF-201.5C
MEIDENSHA SCF-150.1Z
MEIDENSHA SCF-150.2Z
MEIDENSHA SCF-150.25Z
MEIDENSHA SCF-200.3Z
MEIDENSHA SCF-150.33Z
MEIDENSHA SCF-150.4Z
MEIDENSHA SCF-150.5Z
MEIDENSHA SCF-150.75Z
MEIDENSHA SCF-150.8Z
MEIDENSHA SCF-150.84Z
MEIDENSHA SCF-150.9Z
MEIDENSHA SCF-151Z
MEIDENSHA SCF-151.2Z 120
MEIDENSHA SCF-151.3Z 1
MEIDENSHA SCF-151.4Z 1
MEIDENSHA SCF-151.5Z 1
MEIDENSHA SCF-151.8Z 1
MEIDENSHA SCF-152Z 200
MEIDENSHA SCF-52.5Z 25
MEIDENSHA SCF-102.5Z 2
MEIDENSHA SCF-53Z 300
MEIDENSHA SCF-103Z 300
MEIDENSHA SCF-53.5Z 35
MEIDENSHA SCF-103.5Z 3
MEIDENSHA SCF-54Z 400
MEIDENSHA SCF-104Z 400
MEIDENSHA SCF-55Z 500
MEIDENSHA SCF-105Z 500
MEIDENSHA SCF-152.2 22
MEIDENSHA SCF-152.5 25
MEIDENSHA SCF-153 300
MEIDENSHA SCF-56 600
MEIDENSHA SCF-57 700
MEIDENSHA SCF-58 800
MEIDENSHA SCF-59 900
MEIDENSHA SCF-510 1000
MEIDENSHA VP94
MEIDENSHA VP110"
MEIDENSHA VP82
MEIDENSHA VP82L VP94L"
MEIDENSHA VP65"
MEIDENSHA SCV-510M
MEIDENSHA SCV-514M
MEIDENSHA SCV-155M
MEIDENSHA SCV-520M
MEIDENSHA SCV-1010
MEIDENSHA SCV-204
MEIDENSHA SCV-1010G
MEIDENSHA SCV-205G
MEIDENSHA SCV-55
MEIDENSHA SCV-151
MEIDENSHA SCV-152
MEIDENSHA SCV-152.5
MEIDENSHA SCV-155G
MEIDENSHA SCV-7.55
MEIDENSHA SCV-514M 5KV-1400PF
MEIDENSHA SCV-205G (MWF034)
MEIDENSHA SCV-204
MEIDENSHA SCV-520M
MEIDENSHA SCF-201C
MEIDENSHA SCF-200。5C
MEIDENSHA SCF-55Z
MEIDENSHA SCV-250.8D
MEIDENSHA SCV-202D
MEIDENSHA SCF-153
MEIDENSHA SCV-520M
MEIDENSHA SCV-514M 5KV-1400PF
MEIDENSHA SCV-514M 5KV-1400PF
MEIDENSHA SCV-7.55
MEIDENSHA SCF-150.1Z
MEIDENSHA SCV-152.5
MEIDENSHA SCV-514M
MEIDENSHA SCV-151
MEIDENSHA SCV-155M
MEIDENSHA SCV-510M
MEIDENSHA SCV-7.55 (5KV-500pF)
MEIDENSHA SCV-155M(15KV-500pF)
MEIDENSHA SCV-205G
MEIDENSHA SCF-201C
MEIDENSHA SCV-55
MEIDENSHA SCV-7.55
MEIDENSHA SCV-151
MEIDENSHA SCV-152
MEIDENSHA SCV-152.5
MEIDENSHA SCV-510M
MEIDENSHA SCV-514M
MEIDENSHA SCV-155M
MEIDENSHA SCV-520M
MEIDENSHA SCV-1010
MEIDENSHA SCV-204
MEIDENSHA SCV-155G
MEIDENSHA SCV-251G
MEIDENSHA SCV-252G
MEIDENSHA SCV-252.5G
MEIDENSHA SCV-1010G
MEIDENSHA SCV-1014G
MEIDENSHA SCV-205G
MEIDENSHA SCV-1020G
MEIDENSHA SCV-1510G
MEIDENSHA SCV-250.3G
MEIDENSHA SCV-250.8G
MEIDENSHA SCV-300.2G
MEIDENSHA SCV-104G
MEIDENSHA SCV-201.7G
MEIDENSHA SCV-7.55H65
MEIDENSHA SCV-151H65
MEIDENSHA SCV-152H65
MEIDENSHA SCV-152.5H65
MEIDENSHA SCV-510H82
MEIDENSHA SCV-105H82
MEIDENSHA SCV-154H82
MEIDENSHA SCV-202H82
MEIDENSHA SCV-202.2H84
MEIDENSHA SCV-250.8H84
MEIDENSHA SCV-514H94
MEIDENSHA SCV-107H94
MEIDENSHA SCV-155H94
MEIDENSHA SCV-202.5H94
MEIDENSHA SCV-520H110
MEIDENSHA SCV-1010H110
MEIDENSHA SCV-205H110
MEIDENSHA SCV-315H65G
MEIDENSHA SCV-105H65G
MEIDENSHA SCV-201H65G
MEIDENSHA SCV-202H65G
MEIDENSHA SCV-202.5H65G
MEIDENSHA SCV-1010H82G
MEIDENSHA SCV-155H82G
MEIDENSHA SCV-204H82G
MEIDENSHA SCV-252H82G
MEIDENSHA SCV-300.2H84G
MEIDENSHA SCV-1014H94G
MEIDENSHA SCV-157H94G
MEIDENSHA SCV-205H94G
MEIDENSHA SCV-252.5H94G
MEIDENSHA SCV-1020H110G
MEIDENSHA SCV-1510H110G
MEIDENSHA SCV-255H110G
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